• /
  • Optical and mechanical properties of toluene-teos hybrid plasma

Optical and mechanical properties of toluene-teos hybrid plasma

A STUDY OF THE CHARACTERISTICS OF ORGANICINORGANIC HYBRID ...

electrical and the mechanical properties of plasma polymerized thin films, we grew the hybrid polymer thin films under 30W of RF (radio frequency using 13.56MHz)

A STUDY OF THE CHARACTERISTICS OF ORGANICINORGANIC HYBRID ...

Abstract. We investigated the interaction of varied plasma power with ultralow-κ TolueneTEOS hybrid plasma-polymer thin films, as well as changes in electrical and mechanical properties with various mixture ratios of toluene and TEOS (tetraethoxysilane).

A study on electrical and mechanical properties of hybrid ...

A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

Organic and Inorganic Hybrid-Polymer Thin Films by PECVD ...

In order to compare the difference between the optical, electrical, and mechanical properties of the plasma polymerized thin films, we grew the hybrid polymer-like thin films under the conditions of various radio frequency (RF; using 13.56 MHz) powers in the range of 2050 W with the annealing temperature of grown thin films in the range 200500 °C. The as-grown polymerized thin films ...

Characteristics of multilayered plasma-polymer thin films ...

Plasma polymers are used as dielectric and optical coating materials to inhibit corrosion. The investigation of the optical properties of polymer films is of particular interest because of their use in optical devices [1] .

Optical and Mechanical Properties of Toluene-TEOS Hybrid ...

Plasma polymer film has been one of the most widely studied materials due to its outstanding and promising mechanical and physicochemical properties.

The 8th and Diagnostics Joint Workshop with Plasma ...

The 8th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri ( ... [P-01] Changes of optical and mechanical properties of toluene-TEOS hybrid plasma-polymer thin films by post-annealing Jin H. Boo (SKKU, CAPST, Korea) [P-02] A real time controlling of surface temperature and radicals in ULSIs H. Kuroda (Nagoya University ...

Optical and Mechanical Properties of Toluene-TEOS Hybrid ...

Plasma polymer film has been one of the most widely studied materials due to its outstanding and promising mechanical and physicochemical properties.

A Low Dielectric Study on Hybrid Plasma-Polymer Thin Films ...

to compare the difference of the electrical and the mechanical properties of the plasma polymerized thin lms, we grew the hybrid co-polymer thin lms under the conditions of various ratio between toluene and TEOS with xed RF (radio frequency using 13.56 MHz) powers at 30 W.

A STUDY OF THE CHARACTERISTICS OF ORGANICINORGANIC

electrical and the mechanical properties of plasma polymerized thin films, we grew the hybrid polymer thin films under 30W of RF (radio frequency using 13.56MHz)

The Optical and Mechanical Properties of Toluene-TEOS ...

Title: The Optical and Mechanical Properties of Toluene-TEOS Hybrid Plasma-Polymer Thin Films Deposited by PECVD: Authors: Cho, Sang-Jin; Bae, In-Seob;

th International Workshop of Advanced Plasma Processing ...

[P-01] Changes of optical and mechanical properties of toluene-TEOS hybrid plasma-polymer thin films by post-annealing Jin H. Boo (SKKU, CAPST, Korea) [P-02] A real time controlling of surface temperature and radicals in ULSIs H. Kuroda (Nagoya University, Japan) [P-03] A Study on the Diffusion Mechanism of SF 6 By-Products inside a Gas-insulated Switchgear by a Partial Discharge Youn J. Kim ...

The 8th and Diagnostics Joint Workshop with Plasma ...

The 8th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri ( ... [P-01] Changes of optical and mechanical properties of toluene-TEOS hybrid plasma-polymer thin films by post-annealing Jin H. Boo (SKKU, CAPST, Korea) [P-02] A real time controlling of surface temperature and radicals in ULSIs H. Kuroda (Nagoya

A study of the characteristics of organicinorganic hybrid ...

We investigated the interaction of varied plasma power with ultralow-κ TolueneTEOS hybrid plasma-polymer thin films, as well as changes in electrical and mechanical properties with various ...

Plasma Polymerized Thin Films Materials: Synthesis ...

electrical and the mechanical properties of the plasma polymerized thin films, we grew the hybrid co-polymer thin films under the conditions of various ratio between cyclohexene and TEOS with fixed RF

th International Workshop of Advanced Plasma Processing ...

[P-01] Changes of optical and mechanical properties of toluene-TEOS hybrid plasma-polymer thin films by post-annealing Jin H. Boo (SKKU, CAPST, Korea) [P-02] A real time controlling of surface temperature and radicals in ULSIs H. Kuroda (Nagoya University, Japan) [P-03] A Study on the Diffusion Mechanism of SF 6 By-Products inside a Gas-insulated Switchgear by a Partial Discharge Youn J.

A low dielectric study on hybrid plasma-polymer thin films ...

Toluene and TEOS were utilized as organic and inorganic precursors each, and hydrogen and argon were also used as a bubbler and carrier gases, respectively. In order to compare the difference of the electrical and the mechanical properties of the plasma polymerized thin films, we grew the hybrid co-polymer thin films under the conditions of various ratio between toluene and TEOS with fixed RF ...

Journal of MATERIALS RESEARCH Welcome Comments Help

optical, and mechanical properties of the coatings. Various low-temperature densification techniques were studied including sol-preparation procedure, enhanced solvent evaporation, ultraviolet irradiation, and low-temperature heating (below 150 °C). Oxygen plasma etching was applied to improve the adhesion of the sol-gel coatings on the plastic surface. Nanoindentation analysis revealed that ...

A low dielectric study on hybrid plasma-polymer thin films ...

Organic-inorganic hybrid co-polymer thin films were deposited on silicon(100) substrates under the several ratio of TEOS (tetraethoxysilane) against toluene by plasma ...

Electronic, optical, and mechanical properties of ...

The structural, electronic, optical, and mechanical properties of Cu 2 ZnSnS 4 with four crystal structures are calculated using the density functional theory.

Click to Request a Quote
or Submit a Feedback